@article{2365e6da732944e69c5dbbb014207a6f,
title = "Secondary ion mass spectrometry analysis of vertical cavity surface-emitting lasers",
author = "Kim, \{Yong K.\} and Choquette, \{Kent D.\} and Baker, \{Judith E.\} and Allerman, \{Andrew A.\}",
year = "2004",
doi = "10.1116/1.1715051",
language = "English (US)",
volume = "22",
pages = "949--952",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "3",
}