Secondary electron yields of carbon‐coated and polished stainless steel

D. Ruzic, R. Moore, D. Manos, S. Cohen

Research output: Contribution to journalConference articlepeer-review


To increase the power throughput to a plasma of an existing lower hybrid waveguide, secondary electron production on the walls and subsequent electron multiplication must be reduced. Since carbon has a low secondary electron coefficient ( delta ), measurements were performed for several UHV compatible carbon coatings as a function of primary beam voltage, surface roughness, coating thickness, and angle of incidence. Also measured were uncoated stainless steel, Mo, Cu, Ti, TiC, and ATJ graphite. The yields were obtained by varying the sample bias and measuring the collected current while the samples were in the electron beam of a scanning Auger microprobe. This technique permits delta measurements of Auger characterized surfaces with less than equivalent to 0. 3 mm spatial resolution.

Original languageEnglish (US)
Pages (from-to)1313-1316
Number of pages4
JournalJournal of vacuum science & technology
Issue number4
StatePublished - 1981
Externally publishedYes
EventProc of the Natl Symp of the Am Vac Soc, Pt 2 - Anaheim, Calif, USA
Duration: Nov 2 1981Nov 6 1981

ASJC Scopus subject areas

  • Engineering(all)


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