Scattering Cross Sections of Tin Ions With Molecular Hydrogen

Nathan Bartlett, Andrew Herschberg, Jameson Crouse, Raquel Garza, Raj Ganeson, Tamar A. Dallal, Jake Nuttall, Linus Ringstad, David N. Ruzic

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The laser produced plasma of Extreme Ultraviolet (EUV) sources create energetic tin ions. Hydrogen buffer gas is used to slow down the ions through scattering. The scattering cross sections are not well known and are key to modeling the device. Beam attenuation experiments of tin ions in molecular hydrogen gas are underway in order to determine its effective cross section and intermolecular potential. This can be used to model tin ion transport inside of EUV source tools. Measurements are still underway and the exact values of the interatomic potential will be the topic of future publications. Once the potential is well characterized, it will be added to the open-source binary-collision-approximation code RustBCA [3].

Original languageEnglish (US)
Title of host publicationOptical and EUV Nanolithography XXXVI
EditorsAnna Lio
ISBN (Electronic)9781510660953
StatePublished - 2023
EventOptical and EUV Nanolithography XXXVI 2023 - San Jose, United States
Duration: Feb 27 2023Mar 2 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceOptical and EUV Nanolithography XXXVI 2023
Country/TerritoryUnited States
CitySan Jose


  • elastic
  • EUV
  • hydrogen
  • scattering
  • tin

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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