Scanning tunneling microscope stimulated oxidation of silicon (100) surfaces

Keyphrases

• Scanning Tunneling Microscope 100%
• (100) Surfaces 100%
• Scanning Electron Microscopy 33%
• Characterization Techniques 33%
• Atomic Force Microscopy 33%
• P-type 33%
• Passivated 33%
• Si(100) Surface 33%
• Thermal Oxidation 33%
• Auger Electron Spectroscopy 33%
• Chemical Modification 33%
• Reactive Ion Etching 33%
• Pattern Transfer 33%
• Addition Pattern 33%
• Local Oxidation 33%

Material Science

• Oxidation Reaction 100%
• Silicon 100%
• Scanning Electron Microscopy 33%
• Reactive Ion Etching 33%
• Auger Electron Spectroscopy 33%

Engineering

• Scanning Tunneling Microscope 100%
• Atomic Force Microscopy 33%
• Pattern Transfer 33%
• Thermal Oxidation 33%