Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors

G. Zeltzer; J. C. Randel; A. K. Gupta; R. Bashir; S. H. Song; H. C. Manoharan

doi:10.1063/1.2803774

Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors

G. Zeltzer, J. C. Randel, A. K. Gupta, R. Bashir, S. H. Song, H. C. Manoharan

Research output: Contribution to journal › Article › peer-review

Abstract

Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks additionally display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes indicate greater than six times sensitivity enhancement over fundamental mode operation.

Original language	English (US)
Article number	173124
Journal	Applied Physics Letters
Volume	91
Issue number	17
DOIs	https://doi.org/10.1063/1.2803774
State	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2803774

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title = "Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors",

abstract = "Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks additionally display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes indicate greater than six times sensitivity enhancement over fundamental mode operation.",

author = "G. Zeltzer and Randel, {J. C.} and Gupta, {A. K.} and R. Bashir and Song, {S. H.} and Manoharan, {H. C.}",

note = "Funding Information: This work was supported by NSF (Stanford-IBM Center for Probing the Nanoscale and CAREER Program) and ONR (YIP/PECASE). We acknowledge fellowship support from NSF (J.C.R), SBS Foundation (S.-H.S), and the Alfred P. Sloan Foundation (H.C.M). We thank D. Weld and T. Kopley for discussions.",

year = "2007",

doi = "10.1063/1.2803774",

language = "English (US)",

volume = "91",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "17",

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T1 - Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors

AU - Zeltzer, G.

AU - Randel, J. C.

AU - Gupta, A. K.

AU - Bashir, R.

AU - Song, S. H.

AU - Manoharan, H. C.

N1 - Funding Information: This work was supported by NSF (Stanford-IBM Center for Probing the Nanoscale and CAREER Program) and ONR (YIP/PECASE). We acknowledge fellowship support from NSF (J.C.R), SBS Foundation (S.-H.S), and the Alfred P. Sloan Foundation (H.C.M). We thank D. Weld and T. Kopley for discussions.

PY - 2007

Y1 - 2007

N2 - Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks additionally display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes indicate greater than six times sensitivity enhancement over fundamental mode operation.

AB - Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks additionally display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes indicate greater than six times sensitivity enhancement over fundamental mode operation.

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Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors

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