Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

Manu Agarwal, Harsh Mehta, Robert N. Candler, Saurabh A. Chandorkar, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Gaurav Bahl, Gary Yama, Thomas W. Kenny, Boris Murmann

Research output: Contribution to journalArticlepeer-review


This paper studies the scaling of nonlinearities in double-ended-tuning- fork microresonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling. For example, shortening the beams by a factor of 5 results in 20- and 100-fold increases in resonant frequency and sustainable signal current, respectively. Using the nonlinear models and scaling rules outlined in this work, we present considerations for optimization of the resonant structure and its electrostatic gap size.

Original languageEnglish (US)
Article number074903
JournalJournal of Applied Physics
Issue number7
StatePublished - 2007
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy


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