Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

Manu Agarwal; Harsh Mehta; Robert N. Candler; Saurabh A. Chandorkar; Bongsang Kim; Matthew A. Hopcroft; Renata Melamud; Gaurav Bahl; Gary Yama; Thomas W. Kenny; Boris Murmann

doi:10.1063/1.2785018

Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

Manu Agarwal, Harsh Mehta, Robert N. Candler, Saurabh A. Chandorkar, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Gaurav Bahl, Gary Yama, Thomas W. Kenny, Boris Murmann

Research output: Contribution to journal › Article › peer-review

Abstract

This paper studies the scaling of nonlinearities in double-ended-tuning- fork microresonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling. For example, shortening the beams by a factor of 5 results in 20- and 100-fold increases in resonant frequency and sustainable signal current, respectively. Using the nonlinear models and scaling rules outlined in this work, we present considerations for optimization of the resonant structure and its electrostatic gap size.

Original language	English (US)
Article number	074903
Journal	Journal of Applied Physics
Volume	102
Issue number	7
DOIs	https://doi.org/10.1063/1.2785018
State	Published - 2007
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

Online availability

10.1063/1.2785018

Library availability

Discover UIUC Full Text

Cite this

@article{f27bffc6cd82499db0d125818d76f0eb,

title = "Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators",

abstract = "This paper studies the scaling of nonlinearities in double-ended-tuning- fork microresonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling. For example, shortening the beams by a factor of 5 results in 20- and 100-fold increases in resonant frequency and sustainable signal current, respectively. Using the nonlinear models and scaling rules outlined in this work, we present considerations for optimization of the resonant structure and its electrostatic gap size.",

author = "Manu Agarwal and Harsh Mehta and Candler, {Robert N.} and Chandorkar, {Saurabh A.} and Bongsang Kim and Hopcroft, {Matthew A.} and Renata Melamud and Gaurav Bahl and Gary Yama and Kenny, {Thomas W.} and Boris Murmann",

note = "Funding Information: This work was supported by DARPA HERMIT (ONR N66001-03-1-8942), Robert Bosch Corp. (RTC), and the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award No. ECS-9731294, and The National Science Foundation Instrumentation for Materials Research Program (DMR 9504099). ",

year = "2007",

doi = "10.1063/1.2785018",

language = "English (US)",

volume = "102",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "7",

}

TY - JOUR

T1 - Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

AU - Agarwal, Manu

AU - Mehta, Harsh

AU - Candler, Robert N.

AU - Chandorkar, Saurabh A.

AU - Kim, Bongsang

AU - Hopcroft, Matthew A.

AU - Melamud, Renata

AU - Bahl, Gaurav

AU - Yama, Gary

AU - Kenny, Thomas W.

AU - Murmann, Boris

N1 - Funding Information: This work was supported by DARPA HERMIT (ONR N66001-03-1-8942), Robert Bosch Corp. (RTC), and the National Nanofabrication Users Network facilities funded by the National Science Foundation under Award No. ECS-9731294, and The National Science Foundation Instrumentation for Materials Research Program (DMR 9504099).

PY - 2007

Y1 - 2007

N2 - This paper studies the scaling of nonlinearities in double-ended-tuning- fork microresonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling. For example, shortening the beams by a factor of 5 results in 20- and 100-fold increases in resonant frequency and sustainable signal current, respectively. Using the nonlinear models and scaling rules outlined in this work, we present considerations for optimization of the resonant structure and its electrostatic gap size.

AB - This paper studies the scaling of nonlinearities in double-ended-tuning- fork microresonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling. For example, shortening the beams by a factor of 5 results in 20- and 100-fold increases in resonant frequency and sustainable signal current, respectively. Using the nonlinear models and scaling rules outlined in this work, we present considerations for optimization of the resonant structure and its electrostatic gap size.

UR - http://www.scopus.com/inward/record.url?scp=35348879711&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35348879711&partnerID=8YFLogxK

U2 - 10.1063/1.2785018

DO - 10.1063/1.2785018

M3 - Article

AN - SCOPUS:35348879711

SN - 0021-8979

VL - 102

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

M1 - 074903

ER -

Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

Abstract

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this