@inproceedings{9de2d234bd74472da2090e565b17307f,
title = "Scaling Acoustic Filters Towards 5G",
abstract = "This paper presents a micro-electro-mechanical system (MEMS) filter at 10.8 GHz as the first step of scaling electromechanical filters towards fifth-generation (5G) frequencies beyond 6 GHz. The scaling of the center frequency to 10. 8 GHz is made possible by resorting to a higher order asymmetrical lamb wave mode (A3) in lithium niobate (LiNbO3) MEMS resonators. The filter is then constructed using A3 resonator arrays in a ladder configuration. The fabricated resonator has demonstrated an electromechanical coupling (k t 2) of 3.6% and a quality factor (Q) of 337. The Q is among the highest reported for piezoelectric MEMS resonators operating at this frequency range. The fabricated filter at 10.8 GHz has a 3 dB bandwidth of 70 MHz, a minimum insertion loss of 3.7 dB, an in-band ripple less than 0.1 dB, and a compact footprint of 0.7× 0.5 mm 2.",
author = "Yansong Yang and Ruochen Lu and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 64th Annual IEEE International Electron Devices Meeting, IEDM 2018 ; Conference date: 01-12-2018 Through 05-12-2018",
year = "2018",
month = jul,
day = "2",
doi = "10.1109/IEDM.2018.8614699",
language = "English (US)",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "39.6.1--39.6.4",
booktitle = "2018 IEEE International Electron Devices Meeting, IEDM 2018",
address = "United States",
}