Scaling Acoustic Filters Towards 5G

Yansong Yang, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a micro-electro-mechanical system (MEMS) filter at 10.8 GHz as the first step of scaling electromechanical filters towards fifth-generation (5G) frequencies beyond 6 GHz. The scaling of the center frequency to 10. 8 GHz is made possible by resorting to a higher order asymmetrical lamb wave mode (A3) in lithium niobate (LiNbO 3 ) MEMS resonators. The filter is then constructed using A3 resonator arrays in a ladder configuration. The fabricated resonator has demonstrated an electromechanical coupling (k t 2) of 3.6% and a quality factor (Q) of 337. The Q is among the highest reported for piezoelectric MEMS resonators operating at this frequency range. The fabricated filter at 10.8 GHz has a 3 dB bandwidth of 70 MHz, a minimum insertion loss of 3.7 dB, an in-band ripple less than 0.1 dB, and a compact footprint of 0.7× 0.5 mm 2.

Original languageEnglish (US)
Title of host publication2018 IEEE International Electron Devices Meeting, IEDM 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages39.6.1-39.6.4
ISBN (Electronic)9781728119878
DOIs
StatePublished - Jan 16 2019
Event64th Annual IEEE International Electron Devices Meeting, IEDM 2018 - San Francisco, United States
Duration: Dec 1 2018Dec 5 2018

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2018-December
ISSN (Print)0163-1918

Conference

Conference64th Annual IEEE International Electron Devices Meeting, IEDM 2018
CountryUnited States
CitySan Francisco
Period12/1/1812/5/18

Fingerprint

Resonators
Acoustics
resonators
filters
scaling
acoustics
Electromechanical filters
Electromechanical coupling
Lamb waves
Ladders
footprints
Insertion losses
lithium niobates
ripples
insertion loss
ladders
Surface waves
Q factors
Lithium
frequency ranges

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Yang, Y., Lu, R., & Gong, S. (2019). Scaling Acoustic Filters Towards 5G. In 2018 IEEE International Electron Devices Meeting, IEDM 2018 (pp. 39.6.1-39.6.4). [8614699] (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2018-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.2018.8614699

Scaling Acoustic Filters Towards 5G. / Yang, Yansong; Lu, Ruochen; Gong, Songbin.

2018 IEEE International Electron Devices Meeting, IEDM 2018. Institute of Electrical and Electronics Engineers Inc., 2019. p. 39.6.1-39.6.4 8614699 (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2018-December).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yang, Y, Lu, R & Gong, S 2019, Scaling Acoustic Filters Towards 5G. in 2018 IEEE International Electron Devices Meeting, IEDM 2018., 8614699, Technical Digest - International Electron Devices Meeting, IEDM, vol. 2018-December, Institute of Electrical and Electronics Engineers Inc., pp. 39.6.1-39.6.4, 64th Annual IEEE International Electron Devices Meeting, IEDM 2018, San Francisco, United States, 12/1/18. https://doi.org/10.1109/IEDM.2018.8614699
Yang Y, Lu R, Gong S. Scaling Acoustic Filters Towards 5G. In 2018 IEEE International Electron Devices Meeting, IEDM 2018. Institute of Electrical and Electronics Engineers Inc. 2019. p. 39.6.1-39.6.4. 8614699. (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2018.8614699
Yang, Yansong ; Lu, Ruochen ; Gong, Songbin. / Scaling Acoustic Filters Towards 5G. 2018 IEEE International Electron Devices Meeting, IEDM 2018. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 39.6.1-39.6.4 (Technical Digest - International Electron Devices Meeting, IEDM).
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