Scaling Acoustic Filters Towards 5G

Yansong Yang, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a micro-electro-mechanical system (MEMS) filter at 10.8 GHz as the first step of scaling electromechanical filters towards fifth-generation (5G) frequencies beyond 6 GHz. The scaling of the center frequency to 10. 8 GHz is made possible by resorting to a higher order asymmetrical lamb wave mode (A3) in lithium niobate (LiNbO 3 ) MEMS resonators. The filter is then constructed using A3 resonator arrays in a ladder configuration. The fabricated resonator has demonstrated an electromechanical coupling (k t 2) of 3.6% and a quality factor (Q) of 337. The Q is among the highest reported for piezoelectric MEMS resonators operating at this frequency range. The fabricated filter at 10.8 GHz has a 3 dB bandwidth of 70 MHz, a minimum insertion loss of 3.7 dB, an in-band ripple less than 0.1 dB, and a compact footprint of 0.7× 0.5 mm 2.

Original languageEnglish (US)
Title of host publication2018 IEEE International Electron Devices Meeting, IEDM 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages39.6.1-39.6.4
ISBN (Electronic)9781728119878
DOIs
StatePublished - Jan 16 2019
Event64th Annual IEEE International Electron Devices Meeting, IEDM 2018 - San Francisco, United States
Duration: Dec 1 2018Dec 5 2018

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2018-December
ISSN (Print)0163-1918

Conference

Conference64th Annual IEEE International Electron Devices Meeting, IEDM 2018
CountryUnited States
CitySan Francisco
Period12/1/1812/5/18

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Scaling Acoustic Filters Towards 5G'. Together they form a unique fingerprint.

  • Cite this

    Yang, Y., Lu, R., & Gong, S. (2019). Scaling Acoustic Filters Towards 5G. In 2018 IEEE International Electron Devices Meeting, IEDM 2018 (pp. 39.6.1-39.6.4). [8614699] (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2018-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.2018.8614699