@inproceedings{32516491021844b29443619c292d0e12,
title = "S-RuM Technology for Extreme Miniaturization and Integration of Passive Electronics and Microfluidics",
abstract = "Strain-induced Self-rolled-up membrane (S-RuM) technology is a paradigm-shifting fabrication scheme for extreme miniaturization and integration of passive electronic, photonic and microfluidic components. The overarching physical principle of S-RuM is strain-driven spontaneous deformation of 2D membranes into 3D architectures. In this talk, I will present several examples of S-RuM based applications including inductors, transformers, L-C filters, and waveguides, as well as microfluidic channels for neuron cell growth acceleration and DNA-based data storage.",
keywords = "3D MEMS, bio-microfluidics, inductors, microtubes, self-rolled-up membrane (S-RuM)",
author = "Zhendong Yang and Apratim Khandelwal and Paul Froeter and Kristen Nguyen and Wang, {Allen T.} and Wicker, {Scott A.} and Xiuling Li",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",
year = "2024",
doi = "10.1109/MEMS58180.2024.10439466",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "202--205",
booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",
address = "United States",
}