S-RuM Technology for Extreme Miniaturization and Integration of Passive Electronics and Microfluidics

Zhendong Yang, Apratim Khandelwal, Paul Froeter, Kristen Nguyen, Allen T. Wang, Scott A. Wicker, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Strain-induced Self-rolled-up membrane (S-RuM) technology is a paradigm-shifting fabrication scheme for extreme miniaturization and integration of passive electronic, photonic and microfluidic components. The overarching physical principle of S-RuM is strain-driven spontaneous deformation of 2D membranes into 3D architectures. In this talk, I will present several examples of S-RuM based applications including inductors, transformers, L-C filters, and waveguides, as well as microfluidic channels for neuron cell growth acceleration and DNA-based data storage.

Original languageEnglish (US)
Title of host publicationIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages202-205
Number of pages4
ISBN (Electronic)9798350357929
DOIs
StatePublished - 2024
Externally publishedYes
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: Jan 21 2024Jan 25 2024

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/TerritoryUnited States
CityAustin
Period1/21/241/25/24

Keywords

  • 3D MEMS
  • bio-microfluidics
  • inductors
  • microtubes
  • self-rolled-up membrane (S-RuM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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