TY - GEN
T1 - Robust MIMO control of a parallel kinematics nano-positioner for high resolution high bandwidth tracking and repetitive tasks
AU - Dong, Jingyan
AU - Salapaka, Srinivasa M.
AU - Ferreira, Placid M.
PY - 2007
Y1 - 2007
N2 - This paper presents the design and implementation of robust control schemes for two applications of a nanopositioning stage (1) reference trajectory tracking with high resolution over a given bandwidth (2) control design for repetitive motions. The stage has a low degree of freedom monolithic parallel kinematic mechanism using flexure hinges. It is driven by piezoelectric actuators and its displacement is detected by capacitance gauges. The design has strongly coupled dynamics with each actuator input producing in multi-axis motions. The nano-positioner is modeled as a multiple input and multiple output (MIMO) system, and the MIMO plant model is identified by time-domain identification methods. The design of the nano-positioner relies heavily on the control design to account for the high coupling in the system. The proposed H∞ MIMO controller achieves a good performance in terms of resolution, bandwidth and robustness to the modeling uncertainty. In the second part of the paper, we present control design for tasks that require repetitive motion of nano positioning system. These tasks are quite common in micro/nano manipulation and manufacturing. This paper presents a robust control design that gives a significant (over thirty fold) improvement in tracking of repetitive motions on a prespecified frequency band. This design, unlike other schemes, is robust to modeling uncertainties that arise in flexure based mechanisms, and does not require any learning steps during its real time implementation. This design scheme is implemented on a parallel-kinematics XYZ nano positioning stage for repetitive nano-manipulation and nano-manufacturing applications.
AB - This paper presents the design and implementation of robust control schemes for two applications of a nanopositioning stage (1) reference trajectory tracking with high resolution over a given bandwidth (2) control design for repetitive motions. The stage has a low degree of freedom monolithic parallel kinematic mechanism using flexure hinges. It is driven by piezoelectric actuators and its displacement is detected by capacitance gauges. The design has strongly coupled dynamics with each actuator input producing in multi-axis motions. The nano-positioner is modeled as a multiple input and multiple output (MIMO) system, and the MIMO plant model is identified by time-domain identification methods. The design of the nano-positioner relies heavily on the control design to account for the high coupling in the system. The proposed H∞ MIMO controller achieves a good performance in terms of resolution, bandwidth and robustness to the modeling uncertainty. In the second part of the paper, we present control design for tasks that require repetitive motion of nano positioning system. These tasks are quite common in micro/nano manipulation and manufacturing. This paper presents a robust control design that gives a significant (over thirty fold) improvement in tracking of repetitive motions on a prespecified frequency band. This design, unlike other schemes, is robust to modeling uncertainties that arise in flexure based mechanisms, and does not require any learning steps during its real time implementation. This design scheme is implemented on a parallel-kinematics XYZ nano positioning stage for repetitive nano-manipulation and nano-manufacturing applications.
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U2 - 10.1109/CDC.2007.4434317
DO - 10.1109/CDC.2007.4434317
M3 - Conference contribution
AN - SCOPUS:41949092731
SN - 1424414989
SN - 9781424414987
T3 - Proceedings of the IEEE Conference on Decision and Control
SP - 4495
EP - 4500
BT - Proceedings of the 46th IEEE Conference on Decision and Control 2007, CDC
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 46th IEEE Conference on Decision and Control 2007, CDC
Y2 - 12 December 2007 through 14 December 2007
ER -