TY - GEN
T1 - RFIC transformer with 12x size reduction and 15x performance enhancement by self-rolled-up membrane nanotechnology
AU - Huang, Wen
AU - Li, Moyang
AU - Gong, Songbin
AU - Li, Xiuling
N1 - Publisher Copyright:
Copyright © 2015 by ASME.
PY - 2015
Y1 - 2015
N2 - Two types of on-chip RFIC transformers based on CMOS compatible strain-induced self-rolled-up membrane (S-RuM) nanotechnology, with extremely small footprint, are demonstrated. The rolled-up transformers, with their 3D tubular form factors, dramatically reduce the substrate parasitic effects and push the maximum working frequency into millimeter wave bands with a coupling coefficient, k, as high as 0.92. The 3D stand-up nature also allows the tube transformers to be less susceptible to residue stress in the substrate and thus compatible with flexible platforms for wearable RF applications. The demonstrated samples with a turn ratio, n, of 5.5:1 only occupies 805 μm2 on-chip area (s) which is 12x smaller than that of the best planar transformer with the same turn ratio, and its figure of merit n·k/s, is therefore ~ 6046/mm2, enhanced by 15x.
AB - Two types of on-chip RFIC transformers based on CMOS compatible strain-induced self-rolled-up membrane (S-RuM) nanotechnology, with extremely small footprint, are demonstrated. The rolled-up transformers, with their 3D tubular form factors, dramatically reduce the substrate parasitic effects and push the maximum working frequency into millimeter wave bands with a coupling coefficient, k, as high as 0.92. The 3D stand-up nature also allows the tube transformers to be less susceptible to residue stress in the substrate and thus compatible with flexible platforms for wearable RF applications. The demonstrated samples with a turn ratio, n, of 5.5:1 only occupies 805 μm2 on-chip area (s) which is 12x smaller than that of the best planar transformer with the same turn ratio, and its figure of merit n·k/s, is therefore ~ 6046/mm2, enhanced by 15x.
UR - http://www.scopus.com/inward/record.url?scp=84953898031&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84953898031&partnerID=8YFLogxK
U2 - 10.1115/IPACK2015-48585
DO - 10.1115/IPACK2015-48585
M3 - Conference contribution
AN - SCOPUS:84953898031
T3 - ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2015, collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels
BT - Advanced Fabrication and Manufacturing; Emerging Technology Frontiers; Energy, Health and Water- Applications of Nano-, Micro- and Mini-Scale Devices; MEMS and NEMS; Technology Update Talks; Thermal Management Using Micro Channels, Jets, Sprays
PB - American Society of Mechanical Engineers
T2 - ASME 2015 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2015, collocated with the ASME 2015 13th International Conference on Nanochannels, Microchannels, and Minichannels
Y2 - 6 July 2015 through 9 July 2015
ER -