RF-MEMS varactor with minimal contact

Qin Shen, Ioannis Chasiotis, N. Scott Barker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An innovative RF-MEMS varactor has been developed for use in distributed RF-MEMS circuits such as phase shifters and tunable matching networks where the capacitance ratio between on-and off-state must be limited to 2-10. By fabricating standoffs on the bottom side of the beam, this device eliminates the intimate contact between the RF-MEMS and dielectric, that is found in typical RF-MEMS beam capacitive switches. These standoffs limit the range of motion, allowing the capacitance ratio to be set, and also greatly reduces the contact area thus preventing stiction from occurring. The RF-MEMS switch has been fabricated with initial measurements demonstrating a capacitance ratio of 2.5. Preliminary reliability testing results demonstrate that this RF-MEMS design is very robust.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
PublisherAmerican Society of Mechanical Engineers
Pages41-45
Number of pages5
EditionPART A
ISBN (Print)0791841812, 9780791841815
DOIs
StatePublished - 2004
Externally publishedYes
Event2004 ASME/STLE International Joint Tribology Conference - Long Beach, CA, United States
Duration: Oct 24 2004Oct 27 2004

Publication series

NameProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
NumberPART A

Other

Other2004 ASME/STLE International Joint Tribology Conference
CountryUnited States
CityLong Beach, CA
Period10/24/0410/27/04

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Shen, Q., Chasiotis, I., & Barker, N. S. (2004). RF-MEMS varactor with minimal contact. In Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004 (PART A ed., pp. 41-45). [TRIB2004-64340] (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; No. PART A). American Society of Mechanical Engineers. https://doi.org/10.1115/trib2004-64340