RF-MEMS varactor with minimal contact

Qin Shen; Ioannis Chasiotis; N. Scott Barker

doi:10.1115/trib2004-64340

RF-MEMS varactor with minimal contact

Qin Shen, Ioannis Chasiotis, N. Scott Barker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An innovative RF-MEMS varactor has been developed for use in distributed RF-MEMS circuits such as phase shifters and tunable matching networks where the capacitance ratio between on-and off-state must be limited to 2-10. By fabricating standoffs on the bottom side of the beam, this device eliminates the intimate contact between the RF-MEMS and dielectric, that is found in typical RF-MEMS beam capacitive switches. These standoffs limit the range of motion, allowing the capacitance ratio to be set, and also greatly reduces the contact area thus preventing stiction from occurring. The RF-MEMS switch has been fabricated with initial measurements demonstrating a capacitance ratio of 2.5. Preliminary reliability testing results demonstrate that this RF-MEMS design is very robust.

Original language	English (US)
Title of host publication	Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
Publisher	American Society of Mechanical Engineers
Pages	41-45
Number of pages	5
Edition	PART A
ISBN (Print)	0791841812, 9780791841815
DOIs	https://doi.org/10.1115/trib2004-64340
State	Published - 2004
Externally published	Yes
Event	2004 ASME/STLE International Joint Tribology Conference - Long Beach, CA, United States Duration: Oct 24 2004 → Oct 27 2004

Publication series

Name	Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
Number	PART A

Other

Other	2004 ASME/STLE International Joint Tribology Conference
Country/Territory	United States
City	Long Beach, CA
Period	10/24/04 → 10/27/04

ASJC Scopus subject areas

Engineering(all)

Online availability

10.1115/trib2004-64340

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Shen, Q., Chasiotis, I., & Barker, N. S. (2004). RF-MEMS varactor with minimal contact. In Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004 (PART A ed., pp. 41-45). [TRIB2004-64340] (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; No. PART A). American Society of Mechanical Engineers. https://doi.org/10.1115/trib2004-64340

RF-MEMS varactor with minimal contact. / Shen, Qin; Chasiotis, Ioannis; Barker, N. Scott.

Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004. PART A. ed. American Society of Mechanical Engineers, 2004. p. 41-45 TRIB2004-64340 (Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004; No. PART A).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shen, Q, Chasiotis, I & Barker, NS 2004, RF-MEMS varactor with minimal contact. in Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004. PART A edn, TRIB2004-64340, Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004, no. PART A, American Society of Mechanical Engineers, pp. 41-45, 2004 ASME/STLE International Joint Tribology Conference, Long Beach, CA, United States, 10/24/04. https://doi.org/10.1115/trib2004-64340

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RF-MEMS varactor with minimal contact

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