TY - GEN
T1 - RF-MEMS varactor with minimal contact
AU - Shen, Qin
AU - Chasiotis, Ioannis
AU - Barker, N. Scott
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2004
Y1 - 2004
N2 - An innovative RF-MEMS varactor has been developed for use in distributed RF-MEMS circuits such as phase shifters and tunable matching networks where the capacitance ratio between on-and off-state must be limited to 2-10. By fabricating standoffs on the bottom side of the beam, this device eliminates the intimate contact between the RF-MEMS and dielectric, that is found in typical RF-MEMS beam capacitive switches. These standoffs limit the range of motion, allowing the capacitance ratio to be set, and also greatly reduces the contact area thus preventing stiction from occurring. The RF-MEMS switch has been fabricated with initial measurements demonstrating a capacitance ratio of 2.5. Preliminary reliability testing results demonstrate that this RF-MEMS design is very robust.
AB - An innovative RF-MEMS varactor has been developed for use in distributed RF-MEMS circuits such as phase shifters and tunable matching networks where the capacitance ratio between on-and off-state must be limited to 2-10. By fabricating standoffs on the bottom side of the beam, this device eliminates the intimate contact between the RF-MEMS and dielectric, that is found in typical RF-MEMS beam capacitive switches. These standoffs limit the range of motion, allowing the capacitance ratio to be set, and also greatly reduces the contact area thus preventing stiction from occurring. The RF-MEMS switch has been fabricated with initial measurements demonstrating a capacitance ratio of 2.5. Preliminary reliability testing results demonstrate that this RF-MEMS design is very robust.
UR - http://www.scopus.com/inward/record.url?scp=21244483955&partnerID=8YFLogxK
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U2 - 10.1115/trib2004-64340
DO - 10.1115/trib2004-64340
M3 - Conference contribution
AN - SCOPUS:21244483955
SN - 0791841812
SN - 9780791841815
T3 - Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
SP - 41
EP - 45
BT - Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
PB - American Society of Mechanical Engineers
T2 - 2004 ASME/STLE International Joint Tribology Conference
Y2 - 24 October 2004 through 27 October 2004
ER -