Abstract
This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO3) based acoustic microsystems. Thanks to their high electromechanical coupling (k2), low loss, and great frequency scalability, thin-film LiNbO3 has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO3 and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO3 based acoustic microsystems development.
| Original language | English (US) |
|---|---|
| Article number | 114001 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 31 |
| Issue number | 11 |
| Early online date | Sep 30 2021 |
| DOIs | |
| State | Published - Nov 2021 |
Keywords
- acoustic devices
- electromechanical coupling
- frequency scaling
- lithium niobate
- piezoelectric devices
- quality factor
- thin-film devices
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering