RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook

Ruochen Lu, Songbin Gong

Research output: Contribution to journalReview articlepeer-review

Abstract

This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO3) based acoustic microsystems. Thanks to their high electromechanical coupling (k2), low loss, and great frequency scalability, thin-film LiNbO3 has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO3 and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO3 based acoustic microsystems development.

Original languageEnglish (US)
Article number114001
JournalJournal of Micromechanics and Microengineering
Volume31
Issue number11
DOIs
StatePublished - Nov 2021

Keywords

  • acoustic devices
  • electromechanical coupling
  • frequency scaling
  • lithium niobate
  • piezoelectric devices
  • quality factor
  • thin-film devices

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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