Response of electrostatically actuated flexible mems structures to the onset of low-velocity contact

Bryan Wilcox, Harry Dankowicz, Walter Lacarbonara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Near-grazing, low-velocity contact in vibro-impacting systems has been shown to result in dramatic changes in steady-state system response following rapid transient growth of deviations away from the pre-grazing steady-state response. In low-dimensional example systems such transitions are often associated with large jumps in response amplitude. Coupled with the rapidity of the transient dynamics, this phenomenology supports the design of limit-switch sensors that trigger at the onset of grazing contact. A particularly exciting area of application of such sensors, and one in which their implementation might offer particular advantages, is in the context of microelectrome-chanical structures. Here, desirable scaling effects, such as increased system frequencies, low damping, batch fabrication, and decreased packaging size, can be leveraged. Fabricating simple beam structures at the microscale is relatively easier than fabricating proof-mass-based lumped-parameter systems with elaborate suspension structures. Consequently, it often becomes necessary to account for the flexibility of participating mechanical members, for example doubly-clamped, silicon-based beam elements. Physical contact further poses modeling challenges, as the flexibility of the beam elements and that of the contact region necessitate a compliant, but very stiff model description. The present work investigates a sequence of reduced-order models for such a doubly-clamped beam, subject to capacitive electrostatic actuation and a low-compliance physical constraint localized at a point along the span of the beam. The objective is to determine whether grazing-induced transitions, characteristic of lumped-mass models, are retained in the flexible structure. Specifically, numerical simulations are employed to quantify the variations in the response amplitude following the onset of contact and to contrast these to a spreading of system energy across mechanical modes.

Original languageEnglish (US)
Title of host publicationASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
Pages1777-1786
Number of pages10
EditionPARTS A, B AND C
DOIs
StatePublished - Dec 1 2009
EventASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009 - San Diego, CA, United States
Duration: Aug 30 2009Sep 2 2009

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
NumberPARTS A, B AND C
Volume4

Other

OtherASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
CountryUnited States
CitySan Diego, CA
Period8/30/099/2/09

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ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

Cite this

Wilcox, B., Dankowicz, H., & Lacarbonara, W. (2009). Response of electrostatically actuated flexible mems structures to the onset of low-velocity contact. In ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009 (PARTS A, B AND C ed., pp. 1777-1786). (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4, No. PARTS A, B AND C). https://doi.org/10.1115/DETC2009-87011