Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

Keyphrases

• Actuator 33%
• Circ 33%
• Detection System 33%
• High Figure of Merit 33%
• High Quality Factor 33%
• Light Detection 33%
• Lithium Niobate 100%
• Microactuators 100%
• Mirror Detection 33%
• Optical Angles 33%
• Piezoelectric Coefficient 33%
• Ranging System 33%
• Resonant Frequency 33%
• Scanning Angle 33%
• Scanning Micromirror 33%
• Single Crystal 33%
• System Application 33%
• Thin-film Lithium Niobate 100%
• Torsional Actuation 33%
• Y-cut 33%

Engineering

• Actuation 50%
• Figure of Merit 50%
• High Quality Factor 50%
• Light Detection and Ranging 50%
• Piezoelectric Coefficient 50%
• Q Factor 50%
• Resonance Frequency 50%
• Thin Films 100%