TY - GEN
T1 - Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate
AU - Emad, Ahmed
AU - Lu, Ruochen
AU - Li, Ming Huang
AU - Yang, Yansong
AU - Wu, Tao
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/1
Y1 - 2019/1
N2 - This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit (\mathrm{FoM}=\theta-{opt}\cdot \text{mirror dimension}\cdot \mathrm{frequency}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\mathrm{x}40\ \mu \mathrm{m} {2}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 {\circ}\ (\theta-{opt}= 4\cdot\theta-{mech}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.
AB - This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit (\mathrm{FoM}=\theta-{opt}\cdot \text{mirror dimension}\cdot \mathrm{frequency}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\mathrm{x}40\ \mu \mathrm{m} {2}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 {\circ}\ (\theta-{opt}= 4\cdot\theta-{mech}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.
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U2 - 10.1109/MEMSYS.2019.8870894
DO - 10.1109/MEMSYS.2019.8870894
M3 - Conference contribution
AN - SCOPUS:85074321908
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 282
EP - 285
BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Y2 - 27 January 2019 through 31 January 2019
ER -