Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

Ahmed Emad, Ruochen Lu, Ming Huang Li, Yansong Yang, Tao Wu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit (\mathrm{FoM}=\theta-{opt}\cdot \text{mirror dimension}\cdot \mathrm{frequency}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\mathrm{x}40\ \mu \mathrm{m} {2}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 {\circ}\ (\theta-{opt}= 4\cdot\theta-{mech}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.

Original languageEnglish (US)
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages282-285
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: Jan 27 2019Jan 31 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/TerritoryKorea, Republic of
CitySeoul
Period1/27/191/31/19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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