Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Meisam Bahadori (Inventor), Songbin Gong (Inventor), Lynford L. Goddard (Inventor)

Research output: Patent

Abstract

An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.
Original languageEnglish (US)
U.S. patent number11693180
StatePublished - Jul 4 2023

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