Resolution limits of nanoscale thermal processing with the atomic force microscope

Keyphrases

• Atomic Force Microscope 100%
• Resolution Limit 100%
• Thermal Processing 100%
• Solid Contact 66%
• Heat Conduction 33%
• Dependant 33%
• Silicon Cantilever 33%
• Thermomechanical 33%
• Metal Film 33%
• Cantilever Structure 33%
• Substrate Material 33%
• Thermal Conduction 33%
• Atomic Force Microscope Cantilever 33%
• Substrate Interaction 33%
• Thick Metal 33%
• Amorphous Layer 33%
• Atomic Clusters 33%
• Sub-continuum 33%
• Continuum Solid 33%
• Contact Conduction 33%

Engineering

• Nanoscale 100%
• Atomic Force Microscope 100%
• Resolution Limit 100%
• Thermal Processing 100%
• Solid Contact 66%
• Silicon Substrate 33%
• Substrate Material 33%
• Hot Spot 33%

Material Science

• Silicon 100%
• Metal Film 50%