Resolution limits of nanoscale thermal processing with the atomic force microscope

William P. King, Kenneth E. Goodson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A heated atomic force microscope cantilever can raise the temperature of a substrate at the tip-substrate contact to over 500 °C while not substantially raising the temperature of the nearby substrate not in contact with the tip. Models based on continuum solid contact and sub-continuum heat conduction in the tip and in the sample predict that the hot spot could be as small as 2 nm in diameter. This approach to nanoscale thermal processing could be used for fundamental studies of temperature-dependant reactions using small numbers of molecules or atomic clusters, or applications in thermomechanical manufacturing. The resolution limits of nanoscale thermal processing in time, space, and temperature, depend upon the cantilever design, the tip-sample contact, and the substrate material. This paper explores solid contact and thermal conduction between a heated silicon cantilever tip and three different substrates: silicon, a thick metal film, and a thick amorphous layer.

Original languageEnglish (US)
Title of host publicationHeat Transfer
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages277-282
Number of pages6
ISBN (Print)0791836363, 9780791836361
DOIs
StatePublished - Jan 1 2002
Externally publishedYes
EventASME 2002 International Mechanical Engineering Congress and Exposition, IMECE2002 - New Orleans, LA, United States
Duration: Nov 17 2002Nov 22 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
Volume5

Other

OtherASME 2002 International Mechanical Engineering Congress and Exposition, IMECE2002
CountryUnited States
CityNew Orleans, LA
Period11/17/0211/22/02

ASJC Scopus subject areas

  • Mechanical Engineering

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  • Cite this

    King, W. P., & Goodson, K. E. (2002). Resolution limits of nanoscale thermal processing with the atomic force microscope. In Heat Transfer (pp. 277-282). (ASME International Mechanical Engineering Congress and Exposition, Proceedings; Vol. 5). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33854