Skip to main navigation
Skip to search
Skip to main content
Illinois Experts Home
LOGIN & Help
Link opens in a new tab
Search content at Illinois Experts
Home
Profiles
Research units
Research & Scholarship
Datasets
Honors
Press/Media
Activities
Research on the fatigue damage of a polysilicon beam
Cun Jiang Yu
, Jie Ying Tang
, Yun Fei En
, Qian Shi
Research output
:
Contribution to journal
›
Article
›
peer-review
Overview
Fingerprint
Fingerprint
Dive into the research topics of 'Research on the fatigue damage of a polysilicon beam'. Together they form a unique fingerprint.
Sort by
Weight
Alphabetically
Keyphrases
Fatigue Damage
100%
Polysilicon
100%
Young's Modulus
20%
MEMS Structure
20%
Pull-in Voltage
20%
Varying Parameters
20%
Clamped-clamped
20%
Fatigue Properties
20%
Material Science
Fatigue Damage
100%
Microelectromechanical System
20%
Young's Modulus
20%