Representative volume element of polycrystalline silicon for MEMS

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In situ Atomic Force Microscopy (AFM) nanoscale deformation measurements resolved by Digital Image Correlation (DIG) were used to determine the representative volume element of polycrystalline silicon films for Microelectromechanical Systems (MEMS). Local displacement fields were recorded from 1×2 to 5×15-μm2 areas in 2.5 μm thick freestanding specimens that were subject to uniform tension in order to determine the minimum size of the material domain whose mechanical behavior could be described by the isotropic constants. It was found that 10×10-μm2 areas of polysilicon with 650 nm grain size containing on average 15×15 columnar grains constitute a representative volume element. On the contrary, displacement fields in 4×4 μm 2 or 2×2 μm2 polysilicon fields were highly inhomogeneous and the effective mechanical behavior of these specimen domains deviated from that described by isotropy. As a consequence, the isotropic material constants provide an accurate description of the mechanics of uniformly stressed MEMS components comprised of 15×15 or more grains.

Original languageEnglish (US)
Title of host publicationProceedings of the 2006 SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006
Pages1691-1697
Number of pages7
Volume3
StatePublished - 2006
EventSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006 - Saint Louis, MO, United States
Duration: Jun 4 2006Jun 7 2006

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006
CountryUnited States
CitySaint Louis, MO
Period6/4/066/7/06

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Representative volume element of polycrystalline silicon for MEMS'. Together they form a unique fingerprint.

  • Cite this

    Chasiotis, I., & Cho, S. W. (2006). Representative volume element of polycrystalline silicon for MEMS. In Proceedings of the 2006 SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006 (Vol. 3, pp. 1691-1697)