TY - GEN
T1 - Representative volume element of polycrystalline silicon for MEMS
AU - Chasiotis, I.
AU - Cho, S. W.
PY - 2006
Y1 - 2006
N2 - In situ Atomic Force Microscopy (AFM) nanoscale deformation measurements resolved by Digital Image Correlation (DIG) were used to determine the representative volume element of polycrystalline silicon films for Microelectromechanical Systems (MEMS). Local displacement fields were recorded from 1×2 to 5×15-μm2 areas in 2.5 μm thick freestanding specimens that were subject to uniform tension in order to determine the minimum size of the material domain whose mechanical behavior could be described by the isotropic constants. It was found that 10×10-μm2 areas of polysilicon with 650 nm grain size containing on average 15×15 columnar grains constitute a representative volume element. On the contrary, displacement fields in 4×4 μm 2 or 2×2 μm2 polysilicon fields were highly inhomogeneous and the effective mechanical behavior of these specimen domains deviated from that described by isotropy. As a consequence, the isotropic material constants provide an accurate description of the mechanics of uniformly stressed MEMS components comprised of 15×15 or more grains.
AB - In situ Atomic Force Microscopy (AFM) nanoscale deformation measurements resolved by Digital Image Correlation (DIG) were used to determine the representative volume element of polycrystalline silicon films for Microelectromechanical Systems (MEMS). Local displacement fields were recorded from 1×2 to 5×15-μm2 areas in 2.5 μm thick freestanding specimens that were subject to uniform tension in order to determine the minimum size of the material domain whose mechanical behavior could be described by the isotropic constants. It was found that 10×10-μm2 areas of polysilicon with 650 nm grain size containing on average 15×15 columnar grains constitute a representative volume element. On the contrary, displacement fields in 4×4 μm 2 or 2×2 μm2 polysilicon fields were highly inhomogeneous and the effective mechanical behavior of these specimen domains deviated from that described by isotropy. As a consequence, the isotropic material constants provide an accurate description of the mechanics of uniformly stressed MEMS components comprised of 15×15 or more grains.
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M3 - Conference contribution
AN - SCOPUS:33750347261
SN - 091205395X
SN - 9780912053950
T3 - Proceedings of the 2006 SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006
SP - 1691
EP - 1697
BT - Proceedings of the 2006 SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006
T2 - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006
Y2 - 4 June 2006 through 7 June 2006
ER -