Remote Epitaxy: Fundamentals, Challenges, and Opportunities

Bo In Park, Jekyung Kim, Kuangye Lu, Xinyuan Zhang, Sangho Lee, Jun Min Suh, Dong Hwan Kim, Hyunseok Kim, Jeehwan Kim

Research output: Contribution to journalReview articlepeer-review


Advanced heterogeneous integration technologies are pivotal for next-generation electronics. Single-crystalline materials are one of the key building blocks for heterogeneous integration, although it is challenging to produce and integrate these materials. Remote epitaxy is recently introduced as a solution for growing single-crystalline thin films that can be exfoliated from host wafers and then transferred onto foreign platforms. This technology has quickly gained attention, as it can be applied to a wide variety of materials and can realize new functionalities and novel application platforms. Nevertheless, remote epitaxy is a delicate process, and thus, successful execution of remote epitaxy is often challenging. Here, we elucidate the mechanisms of remote epitaxy, summarize recent breakthroughs, and discuss the challenges and solutions in the remote epitaxy of various material systems. We also provide a vision for the future of remote epitaxy for studying fundamental materials science, as well as for functional applications.

Original languageEnglish (US)
Pages (from-to)2939-2952
Number of pages14
JournalNano letters
Issue number10
StatePublished - Mar 13 2024


  • 2D materials
  • freestanding membranes
  • heterogeneous integration
  • remote epitaxy

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • Mechanical Engineering
  • Bioengineering
  • General Materials Science


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