Reliability studies of single crystal silicon beams for rigid micro mirrors

M Taher A Saif, Zhimin Yao, N. C. MacDonald

Research output: Contribution to journalConference article

Abstract

In order to understand the reliability of the mirror-beam system, the failure mechanism of a single crystal silicon bear subjected to torsion and bending is studied. The experimental setup consists of a micro loading device and the SCS test sample at the right end. The minimum section of the pillar is .5 × .5 μm2 at its mid height. The sample is fabricated by partially etching a SCS pillar using SF6. The pillar is twisted and bent until failure. The angle of twist is measured from the relative displacements of the ends of the lever arm. The result implies that the failure strength of SCS increased by about two orders of magnitude as the size is reduced to μm scale. Thus, it follows that the beams can sustain very large deformations before failure.

Original languageEnglish (US)
JournalLEOS Summer Topical Meeting
StatePublished - Jan 1 1996
Externally publishedYes
EventProceedings of the 1996 IEEE/LEOS Summer Topical Meeting - Keystone, CO, USA
Duration: Aug 5 1996Aug 9 1996

Fingerprint

Torsional stress
Etching
Mirrors
Single crystals
mirrors
Silicon
single crystals
silicon
levers
bears
torsion
etching

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Reliability studies of single crystal silicon beams for rigid micro mirrors. / Saif, M Taher A; Yao, Zhimin; MacDonald, N. C.

In: LEOS Summer Topical Meeting, 01.01.1996.

Research output: Contribution to journalConference article

@article{62908081166248b08eb3b7d9136e092a,
title = "Reliability studies of single crystal silicon beams for rigid micro mirrors",
abstract = "In order to understand the reliability of the mirror-beam system, the failure mechanism of a single crystal silicon bear subjected to torsion and bending is studied. The experimental setup consists of a micro loading device and the SCS test sample at the right end. The minimum section of the pillar is .5 × .5 μm2 at its mid height. The sample is fabricated by partially etching a SCS pillar using SF6. The pillar is twisted and bent until failure. The angle of twist is measured from the relative displacements of the ends of the lever arm. The result implies that the failure strength of SCS increased by about two orders of magnitude as the size is reduced to μm scale. Thus, it follows that the beams can sustain very large deformations before failure.",
author = "Saif, {M Taher A} and Zhimin Yao and MacDonald, {N. C.}",
year = "1996",
month = "1",
day = "1",
language = "English (US)",
journal = "LEOS Summer Topical Meeting",
issn = "1099-4742",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Reliability studies of single crystal silicon beams for rigid micro mirrors

AU - Saif, M Taher A

AU - Yao, Zhimin

AU - MacDonald, N. C.

PY - 1996/1/1

Y1 - 1996/1/1

N2 - In order to understand the reliability of the mirror-beam system, the failure mechanism of a single crystal silicon bear subjected to torsion and bending is studied. The experimental setup consists of a micro loading device and the SCS test sample at the right end. The minimum section of the pillar is .5 × .5 μm2 at its mid height. The sample is fabricated by partially etching a SCS pillar using SF6. The pillar is twisted and bent until failure. The angle of twist is measured from the relative displacements of the ends of the lever arm. The result implies that the failure strength of SCS increased by about two orders of magnitude as the size is reduced to μm scale. Thus, it follows that the beams can sustain very large deformations before failure.

AB - In order to understand the reliability of the mirror-beam system, the failure mechanism of a single crystal silicon bear subjected to torsion and bending is studied. The experimental setup consists of a micro loading device and the SCS test sample at the right end. The minimum section of the pillar is .5 × .5 μm2 at its mid height. The sample is fabricated by partially etching a SCS pillar using SF6. The pillar is twisted and bent until failure. The angle of twist is measured from the relative displacements of the ends of the lever arm. The result implies that the failure strength of SCS increased by about two orders of magnitude as the size is reduced to μm scale. Thus, it follows that the beams can sustain very large deformations before failure.

UR - http://www.scopus.com/inward/record.url?scp=0029697822&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029697822&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0029697822

JO - LEOS Summer Topical Meeting

JF - LEOS Summer Topical Meeting

SN - 1099-4742

ER -