Reliability studies of single crystal silicon beams for rigid micro mirrors

M. T.A. Saif, Zhimin Yao, N. C. MacDonald

Research output: Contribution to journalConference articlepeer-review


In order to understand the reliability of the mirror-beam system, the failure mechanism of a single crystal silicon bear subjected to torsion and bending is studied. The experimental setup consists of a micro loading device and the SCS test sample at the right end. The minimum section of the pillar is .5 × .5 μm2 at its mid height. The sample is fabricated by partially etching a SCS pillar using SF6. The pillar is twisted and bent until failure. The angle of twist is measured from the relative displacements of the ends of the lever arm. The result implies that the failure strength of SCS increased by about two orders of magnitude as the size is reduced to μm scale. Thus, it follows that the beams can sustain very large deformations before failure.

Original languageEnglish (US)
Pages (from-to)2
Number of pages2
JournalLEOS Summer Topical Meeting
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1996 IEEE/LEOS Summer Topical Meeting - Keystone, CO, USA
Duration: Aug 5 1996Aug 9 1996

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Reliability studies of single crystal silicon beams for rigid micro mirrors'. Together they form a unique fingerprint.

Cite this