Abstract
In order to understand the reliability of the mirror-beam system, the failure mechanism of a single crystal silicon bear subjected to torsion and bending is studied. The experimental setup consists of a micro loading device and the SCS test sample at the right end. The minimum section of the pillar is .5 × .5 μm2 at its mid height. The sample is fabricated by partially etching a SCS pillar using SF6. The pillar is twisted and bent until failure. The angle of twist is measured from the relative displacements of the ends of the lever arm. The result implies that the failure strength of SCS increased by about two orders of magnitude as the size is reduced to μm scale. Thus, it follows that the beams can sustain very large deformations before failure.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2 |
| Number of pages | 2 |
| Journal | LEOS Summer Topical Meeting |
| State | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1996 IEEE/LEOS Summer Topical Meeting - Keystone, CO, USA Duration: Aug 5 1996 → Aug 9 1996 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering