Reliability assessment of polysilicon MEMS structures under mechanical fatigue loading

A. B.O. Soboyejo, K. D. Bhalerao, W. O. Soboyejo

Research output: Contribution to journalArticlepeer-review


This paper examines the current status and methodologies of study of material and system reliability in Microelectromechanical Systems (MEMS). This includes: a review of the current literature in the area of MEMS regarding failure analysis experimental investigations; testing methods and philosophies for material characterization and possible mechanistic analytical solutions for estimating material properties. The paper proposes a reliability framework that encompasses all the available information. This statistical platform will enable the MEMS design engineer to distill all the available information in the literature into a stand-alone semi-empirical material reliability model, and a holistic system-level model for a complete system.

Original languageEnglish (US)
Pages (from-to)4163-4167
Number of pages5
JournalJournal of Materials Science
Issue number20
StatePublished - Oct 15 2003
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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