Relation between oxide degradation and oxide breakdown

C. Felsch, E. Rosenbaum

Research output: Contribution to journalConference article

Abstract

A novel oxide stressing procedure is used to determine the relation between oxide degradation and oxide breakdown. Results suggest that the mechanism of oxide breakdown depends on the oxide thickness. In 5 and 7 nm oxides, electron trap generation correlates with oxide breakdown. In 10 nm oxide, positive charge trapping correlates with oxide breakdown.

Original languageEnglish (US)
Pages (from-to)142-148
Number of pages7
JournalAnnual Proceedings - Reliability Physics (Symposium)
DOIs
StatePublished - 1995
EventProceedings of the 33rd Annual 1995 IEEE International Reliability Physics Proceedings - Las Vegas, NV, USA
Duration: Apr 4 1995Apr 6 1995

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

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