Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers

Jinlong Zhu, Lynford L. Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate that deep subwavelength scale perturbations on large-scale wafers can be inspected using a regularized phase metrology method. This work paves the route to reference-free defect inspection for nanostructures at advanced technology nodes.

Original languageEnglish (US)
Title of host publication2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580576
DOIs
StatePublished - May 2019
Event2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States
Duration: May 5 2019May 10 2019

Publication series

Name2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings

Conference

Conference2019 Conference on Lasers and Electro-Optics, CLEO 2019
CountryUnited States
CitySan Jose
Period5/5/195/10/19

Fingerprint

Nanostructures
advanced technology
defect
Inspection
perturbation
wafers
Technology
Defects
metrology
inspection
routes
defects
method

ASJC Scopus subject areas

  • Spectroscopy
  • Industrial and Manufacturing Engineering
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Zhu, J., & Goddard, L. L. (2019). Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers. In 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings [8749878] (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/CLEO.2019.8749878

Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers. / Zhu, Jinlong; Goddard, Lynford L.

2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8749878 (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhu, J & Goddard, LL 2019, Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers. in 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings., 8749878, 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2019 Conference on Lasers and Electro-Optics, CLEO 2019, San Jose, United States, 5/5/19. https://doi.org/10.23919/CLEO.2019.8749878
Zhu J, Goddard LL. Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers. In 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8749878. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings). https://doi.org/10.23919/CLEO.2019.8749878
Zhu, Jinlong ; Goddard, Lynford L. / Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers. 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).
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