@inproceedings{b9899ac7bc6b4ee388451c713095283d,
title = "Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers",
abstract = "We demonstrate that deep subwavelength scale perturbations on large-scale wafers can be inspected using a regularized phase metrology method. This work paves the route to reference-free defect inspection for nanostructures at advanced technology nodes.",
author = "Jinlong Zhu and Goddard, {Lynford L.}",
note = "Publisher Copyright: {\textcopyright} 2019 OSA.; 2019 Conference on Lasers and Electro-Optics, CLEO 2019 ; Conference date: 05-05-2019 Through 10-05-2019",
year = "2019",
month = may,
doi = "10.23919/CLEO.2019.8749878",
language = "English (US)",
series = "2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings",
address = "United States",
}