TY - GEN
T1 - Regularized phase reconstruction for sensing deep subwavelength perturbations on large-scale wafers
AU - Zhu, Jinlong
AU - Goddard, Lynford L.
N1 - Publisher Copyright:
© 2019 The Author(s)
PY - 2019
Y1 - 2019
N2 - We demonstrate that deep subwavelength scale perturbations on large-scale wafers can be inspected using a regularized phase metrology method. This work paves the route to reference-free defect inspection for nanostructures at advanced technology nodes.
AB - We demonstrate that deep subwavelength scale perturbations on large-scale wafers can be inspected using a regularized phase metrology method. This work paves the route to reference-free defect inspection for nanostructures at advanced technology nodes.
UR - http://www.scopus.com/inward/record.url?scp=85068163956&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85068163956&partnerID=8YFLogxK
U2 - 10.1364/CLEO_AT.2019.ATh1K.5
DO - 10.1364/CLEO_AT.2019.ATh1K.5
M3 - Conference contribution
AN - SCOPUS:85068163956
SN - 9781943580576
T3 - Optics InfoBase Conference Papers
BT - CLEO
PB - Optica Publishing Group (formerly OSA)
T2 - CLEO: Applications and Technology, CLEO_AT 2019
Y2 - 5 May 2019 through 10 May 2019
ER -