Reduced RC Time Constant High Voltage Tolerant Supply Clamp for ESD Protection in 16nm FinFET Technology

Shudong Huang, Srivatsan Parthasarathy, Yuanzhong Zhou, Jean Jacques Hajjar, Elyse Rosenbaum

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents an active feedback-based high voltage tolerant (5 V) supply clamp for ESD protection in 16-nm FinFET CMOS technology. The proposed trigger circuit biases the BigFETs for maximum ESD robustness and employs positive feedback to maintain the clamp in the on-state such that the clamp can shunt the ESD current for the duration of an HBM event. Negative feedback circuitry is employed to turn the clamp off in case of mistriggering. The clamp is shown to be capable of discharging up to 4-kV HBM current.

Original languageEnglish (US)
Title of host publication2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350369762
DOIs
StatePublished - 2024
Externally publishedYes
Event2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Grapevine, United States
Duration: Apr 14 2024Apr 18 2024

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Conference

Conference2024 IEEE International Reliability Physics Symposium, IRPS 2024
Country/TerritoryUnited States
CityGrapevine
Period4/14/244/18/24

Keywords

  • CMOS
  • electrostatic discharge
  • Supply clamp

ASJC Scopus subject areas

  • General Engineering

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