Reduced-order modeling of weakly nonlinear MEMS devices with Taylor-series expansion and Arnoldi approach

Jinghong Chen, Sung Mo Kang, Jun Zou, Chang Liu, José E. Schutt-Ainé

Research output: Contribution to journalArticle

Abstract

In this paper, we present a new technique by combining the Taylor series expansion with the Arnoldi method to automatically develop reduced-order models for coupled energy domain nonlinear microelectromechanical devices. An electrostatically actuated fixed-fixed beam structure with squeeze-film damping effect is examined to illustrate the model-order reduction method. Simulation results show that the reduced-order nonlinear models can accurately capture the device dynamic behavior over a much larger range of device deformation than the conventional linearized model. Compared with the fully meshed finite-difference method, the model reduction method provides accurate models using orders of magnitude less computation. The reduced MEMS device models are represented by a small number of differential and algebraic equations and thus can be conveniently inserted into a circuit simulator for fast and efficient system-level simulation.

Original languageEnglish (US)
Pages (from-to)441-451
Number of pages11
JournalJournal of Microelectromechanical Systems
Volume13
Issue number3
DOIs
StatePublished - Jun 1 2004

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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