Recent advances in microcavity plasma devices and arrays: A versatile photonic platform

J. G. Eden, S. J. Park, N. P. Ostrom, K. F. Chen

Research output: Contribution to journalArticlepeer-review


Selected highlights in the recent development of microplasma devices are reviewed with emphasis on large arrays of Si-based hybrid plasma/semiconductor pixels. Arrays of 40 000 (200 × 200) pixels, excited by sinusoidal ac waveforms at frequencies of 5-20 kHz, have now been realized. The fabrication of these arrays and their electrical and optical performance with rare gases and Ar/N2 mixtures are briefly described. Metal/dielectric/metal devices having a piezoelectric dielectric (BaTiO3), a cylindrical microcavity 50 νm in diameter, and a total thickness of ∼ 110 νm are also discussed. Finally, the introduction of multiwall carbon nanotubes into microdischarge devices as an auxiliary source of current is presented as being exemplary of the opportunities afforded by the integration of nanotechnology into microcavity plasma structures.

Original languageEnglish (US)
Pages (from-to)1644-1648
Number of pages5
JournalJournal of Physics D: Applied Physics
Issue number11
StatePublished - Jun 7 2005

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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