Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films

Osman El-Atwani, Anastassiya Suslova, Alexander Demasi, Sean Gonderman, Justin Fowler, Mohamad El-Atwani, Karl Ludwig, Jean Paul Allain

Research output: Contribution to journalArticle

Abstract

Real time grazing incidence small angle x-ray scattering and x-ray fluorescence (XRF) are used to elucidate nanodot formation on silicon surfaces during low energy ion beam irradiation of ultrathin iron-coated silicon substrates. Four surface modification stages were identified: (1) surface roughening due to film erosion, (2) surface smoothing and silicon-iron mixing, (3) structure formation, and (4) structure smoothing. The results conclude that 2.5 × 1015 iron atoms in a 50 nm depth triggers surface nanopatterning with a correlated nanodots distance of 25 nm. Moreover, there is a wide window in time where the surface can have correlated nanostructures even after the removal of all the iron atoms from the sample as confirmed by XRF and ex-situ x-ray photoelectron spectroscopy (XPS). In addition, in-situ XPS results indicated silicide formation, which plays a role in the structure formation mechanism.

Original languageEnglish (US)
Article number263104
JournalApplied Physics Letters
Volume101
Issue number26
DOIs
StatePublished - Dec 24 2012
Externally publishedYes

Fingerprint

iron
silicon
x ray fluorescence
smoothing
x ray spectroscopy
ion beams
photoelectron spectroscopy
irradiation
atoms
energy
x ray scattering
grazing incidence
erosion
actuators
removal

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films. / El-Atwani, Osman; Suslova, Anastassiya; Demasi, Alexander; Gonderman, Sean; Fowler, Justin; El-Atwani, Mohamad; Ludwig, Karl; Paul Allain, Jean.

In: Applied Physics Letters, Vol. 101, No. 26, 263104, 24.12.2012.

Research output: Contribution to journalArticle

El-Atwani, O, Suslova, A, Demasi, A, Gonderman, S, Fowler, J, El-Atwani, M, Ludwig, K & Paul Allain, J 2012, 'Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films' Applied Physics Letters, vol 101, no. 26, 263104. DOI: 10.1063/1.4773202
El-Atwani O, Suslova A, Demasi A, Gonderman S, Fowler J, El-Atwani M et al. Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films. Applied Physics Letters. 2012 Dec 24;101(26). 263104. Available from, DOI: 10.1063/1.4773202

El-Atwani, Osman; Suslova, Anastassiya; Demasi, Alexander; Gonderman, Sean; Fowler, Justin; El-Atwani, Mohamad; Ludwig, Karl; Paul Allain, Jean / Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films.

In: Applied Physics Letters, Vol. 101, No. 26, 263104, 24.12.2012.

Research output: Contribution to journalArticle

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