Real-time imaging of surface evolution driven by variable-energy ion irradiation

W. Swiech; M. Rajappan; M. Ondrejcek; E. Sammann; S. Burdin; I. Petrov; C. P. Flynn

doi:10.1016/j.ultramic.2007.10.005

Real-time imaging of surface evolution driven by variable-energy ion irradiation

W. Swiech, M. Rajappan, M. Ondrejcek, E. Sammann, S. Burdin, I. Petrov, C. P. Flynn

National Center for Supercomputing Applications (NCSA)

Research output: Contribution to journal › Article › peer-review

Abstract

We describe the design of a tandem instrument combining a low-energy electron microscope (LEEM) and a negative ion accelerator. This instrument provides video rate imaging of surface microtopography and the dynamics of its evolution during irradiation by energetic ions, at temperatures up to 1700 K. The negative ion beam is incident on the sample at normal incidence with impact energies selectable in the range 0-5 keV, and with current densities up to 30 μA/cm² (∼2×10¹⁴ ions/cm² s or ∼0.2 ML/s). The LEEM operates at a base pressure in the 10^-9 Pa range. We describe the design and operating principles of the instrument and present examples of Pt(1 1 1) and Si(0 0 1) self-ion irradiation experiments.

Original language	English (US)
Pages (from-to)	646-655
Number of pages	10
Journal	Ultramicroscopy
Volume	108
Issue number	7
DOIs	https://doi.org/10.1016/j.ultramic.2007.10.005
State	Published - Jun 2008

Keywords

Ion source
Irradiation
Low-energy electron microscopy
Sputtering

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

Online availability

10.1016/j.ultramic.2007.10.005

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title = "Real-time imaging of surface evolution driven by variable-energy ion irradiation",

abstract = "We describe the design of a tandem instrument combining a low-energy electron microscope (LEEM) and a negative ion accelerator. This instrument provides video rate imaging of surface microtopography and the dynamics of its evolution during irradiation by energetic ions, at temperatures up to 1700 K. The negative ion beam is incident on the sample at normal incidence with impact energies selectable in the range 0-5 keV, and with current densities up to 30 μA/cm2 (∼2×1014 ions/cm2 s or ∼0.2 ML/s). The LEEM operates at a base pressure in the 10-9 Pa range. We describe the design and operating principles of the instrument and present examples of Pt(1 1 1) and Si(0 0 1) self-ion irradiation experiments.",

keywords = "Ion source, Irradiation, Low-energy electron microscopy, Sputtering",

author = "W. Swiech and M. Rajappan and M. Ondrejcek and E. Sammann and S. Burdin and I. Petrov and Flynn, {C. P.}",

note = "Funding Information: The research was supported by the US Department of Energy through Grant DEFG02-02-ER46011. The Low-Energy Electron Microscopy facility is a part of the Center for Microanalysis of Materials, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, supported by the DOE under Grant DEFG02-91-ER45439. ",

year = "2008",

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doi = "10.1016/j.ultramic.2007.10.005",

language = "English (US)",

volume = "108",

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journal = "Ultramicroscopy",

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AU - Swiech, W.

AU - Rajappan, M.

AU - Ondrejcek, M.

AU - Sammann, E.

AU - Burdin, S.

AU - Petrov, I.

AU - Flynn, C. P.

N1 - Funding Information: The research was supported by the US Department of Energy through Grant DEFG02-02-ER46011. The Low-Energy Electron Microscopy facility is a part of the Center for Microanalysis of Materials, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, supported by the DOE under Grant DEFG02-91-ER45439.

PY - 2008/6

Y1 - 2008/6

N2 - We describe the design of a tandem instrument combining a low-energy electron microscope (LEEM) and a negative ion accelerator. This instrument provides video rate imaging of surface microtopography and the dynamics of its evolution during irradiation by energetic ions, at temperatures up to 1700 K. The negative ion beam is incident on the sample at normal incidence with impact energies selectable in the range 0-5 keV, and with current densities up to 30 μA/cm2 (∼2×1014 ions/cm2 s or ∼0.2 ML/s). The LEEM operates at a base pressure in the 10-9 Pa range. We describe the design and operating principles of the instrument and present examples of Pt(1 1 1) and Si(0 0 1) self-ion irradiation experiments.

AB - We describe the design of a tandem instrument combining a low-energy electron microscope (LEEM) and a negative ion accelerator. This instrument provides video rate imaging of surface microtopography and the dynamics of its evolution during irradiation by energetic ions, at temperatures up to 1700 K. The negative ion beam is incident on the sample at normal incidence with impact energies selectable in the range 0-5 keV, and with current densities up to 30 μA/cm2 (∼2×1014 ions/cm2 s or ∼0.2 ML/s). The LEEM operates at a base pressure in the 10-9 Pa range. We describe the design and operating principles of the instrument and present examples of Pt(1 1 1) and Si(0 0 1) self-ion irradiation experiments.

KW - Ion source

KW - Irradiation

KW - Low-energy electron microscopy

KW - Sputtering

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Real-time imaging of surface evolution driven by variable-energy ion irradiation

Abstract

Keywords

ASJC Scopus subject areas

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