Reactive magnetron sputtering of silicon in Ar + CH4: identity and energy of the SiC growth species

M. P. Fitzner, John R Abelson

Research output: Contribution to journalConference articlepeer-review

Fingerprint

Dive into the research topics of 'Reactive magnetron sputtering of silicon in Ar + CH4: identity and energy of the SiC growth species'. Together they form a unique fingerprint.

Material Science