Reaction rate kinetics and film textures of palladium silicide formed on hydrogenated amorphous silicon

Engineering & Materials Science

• Silicides 100%
• Amorphous silicon 99%
• Palladium 96%
• Textures 58%
• Diffraction 39%
• Activation energy 38%
• X rays 33%
• Isothermal annealing 30%
• Solid state reactions 28%
• Crystalline materials 19%
• Thin films 17%
• Substrates 12%
• Metals 11%
• Experiments 6%

Physics & Astronomy

• palladium 78%
• silicides 75%
• amorphous silicon 67%
• reaction kinetics 66%
• textures 60%
• kinetics 43%
• electrical resistivity 34%
• x ray diffraction 31%
• activation energy 26%
• metal films 18%
• solid state 13%
• grain size 13%
• probes 11%
• annealing 10%
• thin films 9%

Chemical Compounds

• Amorphous Silicon 99%
• Crystalline Texture 71%
• Palladium 55%
• Liquid Film 35%
• Grain Size 17%
• Solid State Reaction 16%
• Annealing 14%
• Probe 11%
• Purity 9%
• Metal 8%