Ramp-rate effects on transient enhanced diffusion and dopant activation

M. Y.L. Jung, R. Gunawan, R. D. Braatz, E. G. Seebauer

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Ramp-rate effects on transient enhanced diffusion and dopant activation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science