Fingerprint
Dive into the research topics of 'Raman thermometry of polysilicon microelectro-mechanical systems in the presence of an evolving stress'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Raman thermometry of polysilicon microelectro-mechanical systems in the presence of an evolving stress
Mark R. Abel, Samuel Graham, Justin R. Serrano, Sean P. Kearney, Leslie M. Phinney
Research output: Contribution to journal › Article › peer-review