Raman thermometry of polysilicon microelectro-mechanical systems in the presence of an evolving stress

Mark R. Abel, Samuel Graham, Justin R. Serrano, Sean P. Kearney, Leslie M. Phinney

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, the use of Raman Stokes peak location and linewidth broadening methods were evaluated for thermometry applications of polysilicon micraheaters subjected to evolving thermal stresses. Calibrations were performed using the temperature dependence of each spectral characteristic separately, and the uncertainty of each method quantified. It was determined that the Stokes linewidth was independent of stress variation allowing for temperature determination, irrespective of stress state. However the linewidth method is subject to greater uncertainty than the Stokes shift determination. The uncertainties for each method are observed to decrease with decreasing temperature and increasing integration times. The techniques were applied to mechanically constrained electrically active polysilicon microheaters. Results revealed temperatures in excess of 500°C could be achieved in these devices. Using the peak location method resulted in an underprediction of temperature due to the development of a relative compressive thermal stress with increasing power dissipation.

Original languageEnglish (US)
Pages (from-to)329-334
Number of pages6
JournalJournal of Heat Transfer
Volume129
Issue number3
DOIs
StatePublished - Mar 2007
Externally publishedYes

Keywords

  • MEMS
  • Raman spectroscopy
  • Thermal stresses
  • Thermometry

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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