Raised on-chip inductor and method of manufacturing same

Jun Zou (Inventor), Jose Schutt-Aine (Inventor), Chang Liu (Inventor)

Research output: Patent


A raised on-chip planar inductor. An inductor is fabricated on a substrate. The inductor, except for an anchoring extremity, is lifted from the substrate, preferably by application of a magnetic field to a magnetic layer formed on the inductor. The lifting of the inductor deforms a plastic bending region. After the magnetic field is removed, the inductor remains raised with respect to the substrate.
Original languageEnglish (US)
U.S. patent number6922127
Filing date5/23/02
StatePublished - Jul 26 2005


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