Abstract
A raised on-chip planar inductor. An inductor is fabricated on a substrate. The inductor, except for an anchoring extremity, is lifted from the substrate, preferably by application of a magnetic field to a magnetic layer formed on the inductor. The lifting of the inductor deforms a plastic bending region. After the magnetic field is removed, the inductor remains raised with respect to the substrate.
| Original language | English (US) |
|---|---|
| U.S. patent number | 6922127 |
| Filing date | 5/23/02 |
| State | Published - Jul 26 2005 |