Quantum dot emission modulation using piezoelectric photonic crystal MEMS resonators

Quantum dots (QDs) integration into photonic devices requires varied approaches to control and modulate their emission. We demonstrate voltage-tunable PC structures with integrated QDs over suspended piezoelectric aluminum nitride thin film resonators that modulate PC enhancement at MHz frequencies. When the piezoelectric device is actuated at its resonant mechanical frequency, the extracted QD emission direction is likewise modulated via the optical resonant frequency of the PC. Modulation uses nanometer-scale mechanical displacements, offering the potential for greater switching speed and improved mechanical robustness that is not subject to the effects of stiction with a scalable fabrication approach.