Quantitative convergent beam electron diffraction

Research output: Contribution to journalReview articlepeer-review


This paper describes the refinement method of quantitative electron diffraction using the convergent beam method, with emphasis on the algorithm and experimental measurements. Two examples are given. One is the lattice parameter measurement by comparing calculated and experimental CBED pattern using correlation and image processing for the enhancement of line contrast. The other is the structure factor determination of Si, used as a test of the refinement method. The possibilities of quantitative CBED are highlighted by a brief review of published applications to materials science.

Original languageEnglish (US)
Pages (from-to)938-946
Number of pages9
JournalMaterials Transactions, JIM
Issue number9
StatePublished - Sep 1998
Externally publishedYes


  • Convergent beam electron diffraction
  • Electron diffraction
  • Lattice parameters
  • Structure refinement

ASJC Scopus subject areas

  • Engineering(all)


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