@inproceedings{f52bd90ed58845ba958fd08282c4ad7a,
title = "Q-enhanced Lithium Niobate SH0 Resonators with Optimized Acoustic Boundaries",
abstract = "In this work, a quality factor (Q) enhancement technique has been investigated for the fundamental shear-horizontal (SH0) mode lithium niobate resonators. Four supporting tether designs are employed in combination with an optimized release distance to enhance the acoustic isolation and consequently attain a higher Q without introducing spurious modes. The fabricated prototype resonator with tapered tether design at 90 MHz exhibits a Q of 2,600 and an electromechanical coupling (k-{ t}^{ 2}) of 17%, resulting in a high figure-of-merit (FoM= k-{ t}^{ 2} \times Q) of 442. The Q of 2,600 underlines a 2X Q enhancement from a conventional straight supporting design. The perfectly matched layer (PML) method is adopted to optimize the energy loss with different acoustic boundaries. Results from our comprehensive finite-element analyses (FEA) are also reported to rationalize our design choices and confirm a Q estimation error within 15% of the measured values.",
keywords = "impedance transformation, lithium niobate, perfectly matched layer, piezoelectricity, plate wave, quality factor",
author = "Chen, {Chao Yu} and Li, {Sheng Shian} and Li, {Ming Huang} and Anming Gao and Ruochen Lu and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019 ; Conference date: 14-04-2019 Through 18-04-2019",
year = "2019",
month = apr,
doi = "10.1109/FCS.2019.8856007",
language = "English (US)",
series = "IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings",
address = "United States",
}