Q-enhanced Lithium Niobate SH0 Resonators with Optimized Acoustic Boundaries

Chao Yu Chen, Sheng Shian Li, Ming Huang Li, Anming Gao, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, a quality factor (Q) enhancement technique has been investigated for the fundamental shear-horizontal (SH0) mode lithium niobate resonators. Four supporting tether designs are employed in combination with an optimized release distance to enhance the acoustic isolation and consequently attain a higher Q without introducing spurious modes. The fabricated prototype resonator with tapered tether design at 90 MHz exhibits a Q of 2,600 and an electromechanical coupling (k-{ t}^{ 2}) of 17%, resulting in a high figure-of-merit (FoM= k-{ t}^{ 2} \times Q) of 442. The Q of 2,600 underlines a 2X Q enhancement from a conventional straight supporting design. The perfectly matched layer (PML) method is adopted to optimize the energy loss with different acoustic boundaries. Results from our comprehensive finite-element analyses (FEA) are also reported to rationalize our design choices and confirm a Q estimation error within 15% of the measured values.

Original languageEnglish (US)
Title of host publicationIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683057
DOIs
StatePublished - Apr 2019
Externally publishedYes
Event2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019 - Orlando, United States
Duration: Apr 14 2019Apr 18 2019

Publication series

NameIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings

Conference

Conference2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019
Country/TerritoryUnited States
CityOrlando
Period4/14/194/18/19

Keywords

  • impedance transformation
  • lithium niobate
  • perfectly matched layer
  • piezoelectricity
  • plate wave
  • quality factor

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications
  • Instrumentation

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