Pyroelectric electron emission from a thin film of PbZrxTi 1-xO3 on a nanofabricated cathode

P. C. Fletcher, R. V.K. Mangalam, L. W. Martin, W. P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report pyroelectric emission from thin films of crystalline PbZr 0.8Ti0.2O3 (PZT) on nanometer-sharp tips. The epitaxial PZT films are 30 nm thick and grown directly on batch fabricated single-crystal silicon tips. Pyroelectric emission occurs for heating rates ≥ 50 °C/min in a 20 V/μm external field, and for electric field strengths ≥ 6.7 V/μm when heated at 100 °C/min. The emitted electric charge is reasonable when compared to the theoretical maximum charge for this PZT film and these testing parameters. We calculate that a heating rate of 4.0×10 7 °C/min is necessary for unassisted pyroelectric emission.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages772-775
Number of pages4
DOIs
StatePublished - 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/TerritorySpain
CityBarcelona
Period6/16/136/20/13

Keywords

  • PZT
  • Pyroelectric
  • electron emission
  • tip array

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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