Protocol for obtaining noise-immune absolute ellipsometric measurements with high spatial resolution

Santosh Tripathi, Kimani C. Toussaint

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A protocol that utilizes Stokes parameters and inverse methods for obtaining noise immune absolute ellipsometric measurements with high spatial resolution is proposed. It is applicable for arbitrary scalar and vector beam inputs.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2009
PublisherOptical Society of America
ISBN (Print)9781557528780
StatePublished - Jan 1 2009
EventFrontiers in Optics, FiO 2009 - San Jose, CA, United States
Duration: Oct 11 2009Oct 15 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherFrontiers in Optics, FiO 2009
CountryUnited States
CitySan Jose, CA
Period10/11/0910/15/09

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Tripathi, S., & Toussaint, K. C. (2009). Protocol for obtaining noise-immune absolute ellipsometric measurements with high spatial resolution. In Frontiers in Optics, FiO 2009 (Optics InfoBase Conference Papers). Optical Society of America.