@inproceedings{8c08ba64a6584c5784d314fd11d91995,
title = "Progress on heterogeneous integration: Devices and processes",
abstract = "The heterogeneous integration of compound semiconductors with silicon has been widely studied because of its potential for bringing photonic functionality and improved high-speed performance onto a semiconductor platform with a significant installed manufacturing base. Progress on heterogeneous integration processing methods and devices will be reviewed, and novel methods involving epitaxial transfer and photolithographic optical alignment as a vehicle for producing CMOS-scale electronic-photonic integrated circuits will be discussed. Progress on novel devices such as the light-emitting transistor as a fundamental circuit element for mixed electronic-photonic processing cores will also be presented.",
keywords = "III-V semiconductor materials, Integrated optoelectronics, nanofabrication, optoelectronic devices, semiconductor materials, silicon, silicon photonics",
author = "Dallesasse, {J. M.} and B. Kesler and Lam, {P. L.} and G. Walter",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015 ; Conference date: 01-06-2015 Through 04-06-2015",
year = "2015",
month = sep,
day = "30",
doi = "10.1109/EDSSC.2015.7285067",
language = "English (US)",
series = "Proceedings of the 2015 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "130--133",
booktitle = "Proceedings of the 2015 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2015",
address = "United States",
}