Programmable transformation of vertically aligned carbon nanotubes into 3D microstructures

M. De Volder, S. Tawfick, S. J. Park, D. Copic, A. J. Hart

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Capillary forming of carbon nanotubes (CNTs) enables the fabrication of unique 3D microstructures over large areas. In this paper we focus on the simulation as well as on the integration of these structures in MEMS devices. We developed finite element models (FEM) that enables qualitative prediction of shape transformations caused by capillary forming; and show how capillary formed CNT structured can be integrated with conventional lithographic processing for patterning of polymers and metals in concert with CNTs.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2718-2721
Number of pages4
DOIs
StatePublished - 2011
Externally publishedYes
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • Capillary
  • Carbon nanotube (CNT)
  • Self-Assembly
  • Three-dimensional

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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