Skip to main navigation
Skip to search
Skip to main content
Illinois Experts Home
LOGIN & Help
Home
Profiles
Research units
Research & Scholarship
Datasets
Honors
Press/Media
Activities
Search by expertise, name or affiliation
PROFILE FORMATION IN CAIBE.
J. D. Chinn
, I. Adesida
, E. D. Wolf
Research output
:
Contribution to specialist publication
›
Article
Overview
Fingerprint
Fingerprint
Dive into the research topics of 'PROFILE FORMATION IN CAIBE.'. Together they form a unique fingerprint.
Sort by
Weight
Alphabetically
Keyphrases
Chemically Assisted Ion Beam Etching
100%
Broad Beam
66%
Operating Conditions
33%
Ion Bombardment
33%
Etching Rate
33%
Etching Process
33%
Chemically Reactive
33%
Argon
33%
Dry Etching
33%
Ionic Flux
33%
Beam Ions
33%
Cl 2
33%
Metal Silicide
33%
Refractory Metals
33%
Reactive Ions
33%
Chemical Flux
33%
Background Gas
33%
Reactive Gas
33%
Two-component Gas
33%
Gas System
33%
Xenon Difluoride
33%
Assist Techniques
33%
Material Science
Silicide
100%
Dry Etching
100%
Xenon
100%
Refractory Metal
100%
Ion Bombardment
100%