Keyphrases
PbTiO3
100%
Residual Stress
100%
Stress Property
100%
Dielectric Properties
100%
Processing Effects
100%
PbZrO3
100%
Biaxial Tensile Stress
33%
K(I)
16%
Room Temperature
16%
Film Thickness
16%
Chemical Composition
16%
Dielectric Constant
16%
Crystal Orientation
16%
Si Substrate
16%
High-k Dielectric
16%
Sol-gel
16%
Phase Transformation
16%
Deposition Conditions
16%
Low Loss
16%
Synthesis Conditions
16%
Wafer Curvature
16%
Stress Value
16%
Laser Reflection
16%
3-phase
16%
Phase Content
16%
Varying Thickness
16%
Thermal Processing
16%
Sol-gel Synthesis
16%
Sol-gel Deposition
16%
Baseline Correction
16%
Perovskite Grain Size
16%
Dielectric Anomaly
16%
TiO2-SiO2
16%
Series Capacitor
16%
Capacitor Model
16%
Material Science
Film
100%
Residual Stress
100%
Dielectric Property
100%
Ultimate Tensile Strength
40%
Sol-Gel
40%
Dielectric Material
40%
Film Thickness
20%
Grain Size
20%
Permittivity
20%
Capacitor
20%
Engineering
Dielectrics
100%
Residual Stress
100%
Tensile Stress σ
40%
Good Agreement
20%
Room Temperature
20%
Si Substrate
20%
Crystallographic Orientation
20%
Deposition Condition
20%
Thermal Processing
20%
Reflectance
20%