Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems

A. John Hart, Sei Jin Park, Michael F.L. de Volder, Sameh H. Tawfick, Eric R. Meshot

Research output: Chapter in Book/Report/Conference proceedingChapter


The outstanding properties of carbon nanotubes (CNTs) make them compelling materials for use in applications including nanoscale circuits, flexible conductors, battery electrodes, and reinforced composites; and their combination of attractive mechanical, thermal, and electrical properties makes them truly unique. However, as with any new material, practical use requires efficient and scalable processing methods, and commercial development requires these methods to be compatible with existing manufacturing platforms such as semiconductor processing. This chapter presents a thorough review of methods for integrating CNTs into micro- and nanodevices and systems, focusing on challenges of controlling CNT size and structure; precisely placing and packing CNTs; and achieving device-compatible growth and processing methods. Examples are selected across the spectrum from early-stage research to present commercialization. Overall, while we are far from meeting the aforementioned challenges, near-term uses of CNTs will include interconnects, non-volatile memory, inertial sensors, and thermal interfaces.
Original languageEnglish (US)
Title of host publicationMicroelectronics to Nanoelectronics
Subtitle of host publicationMaterials, Devices & Manufacturability
EditorsAnupama B. Kaul
PublisherCRC Press
ISBN (Electronic)9781315216492
ISBN (Print)9781466509542, 9781138072374
StatePublished - Aug 24 2012
Externally publishedYes


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