TY - JOUR
T1 - Preparation and electrochemical properties of boron-doped polycrystalline diamond film with five-fold twin structure
AU - Zhang, Kehao
AU - Wang, Hailong
AU - Zhao, Yanjun
AU - Xi, Yaohui
AU - Liu, Bin
AU - Xi, Jianqi
AU - Shao, Gang
AU - Fan, Bingbing
AU - Lu, Hongxia
AU - Xu, Hongliang
AU - Zhang, Rui
AU - Yan, Ning
AU - Wang, Zhiqiang
N1 - Publisher Copyright:
© 2021 Elsevier B.V.
PY - 2021/12/1
Y1 - 2021/12/1
N2 - In this study, boron-doped polycrystalline diamond (BDD) films were deposited on 6-inch silicon wafer by using microwave plasma chemical vapor deposition (MPCVD). Mixed gas containing hydrogen, methane, and diborane was used as precursor and the wafer temperatures were set at 750 °C, 850 °C and 950 °C, respectively. Five-fold twin structures were observed in the samples prepared at 850 °C and they promote the increase of surface roughness. Furthermore, these twin structures may lead to the increase of boron atoms at the surface, which was verified by first-principles calculation. BDD film that contains five-fold twin structures has higher Hall mobility, lower electrical resistivity and larger hole carrier concentrations at room temperature. Besides, reactive red X-3B (200 mg/L) was fully degraded by BDD electrodes at current density of 100 mA/cm2 within 40 min using NaCl as supporting electrolyte. Overall, BDD film electrodes prepared by appropriate methods contain a large quantity of five-fold twin structures surface have excellent electrochemical properties and thereby demonstrate potential as a promising waste water degradation material.
AB - In this study, boron-doped polycrystalline diamond (BDD) films were deposited on 6-inch silicon wafer by using microwave plasma chemical vapor deposition (MPCVD). Mixed gas containing hydrogen, methane, and diborane was used as precursor and the wafer temperatures were set at 750 °C, 850 °C and 950 °C, respectively. Five-fold twin structures were observed in the samples prepared at 850 °C and they promote the increase of surface roughness. Furthermore, these twin structures may lead to the increase of boron atoms at the surface, which was verified by first-principles calculation. BDD film that contains five-fold twin structures has higher Hall mobility, lower electrical resistivity and larger hole carrier concentrations at room temperature. Besides, reactive red X-3B (200 mg/L) was fully degraded by BDD electrodes at current density of 100 mA/cm2 within 40 min using NaCl as supporting electrolyte. Overall, BDD film electrodes prepared by appropriate methods contain a large quantity of five-fold twin structures surface have excellent electrochemical properties and thereby demonstrate potential as a promising waste water degradation material.
KW - Boron-doped polycrystalline diamond films
KW - Electrical properties
KW - Electrochemical characterization
KW - Five-fold twin structure
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U2 - 10.1016/j.apsusc.2021.150977
DO - 10.1016/j.apsusc.2021.150977
M3 - Article
AN - SCOPUS:85113272812
SN - 0169-4332
VL - 568
JO - Applied Surface Science
JF - Applied Surface Science
M1 - 150977
ER -