@article{f4e99067f8b141df96edcdadc10c2742,
title = "Preface for the AVS Peter Mark award 40th anniversary collection",
author = "Aydil, {Eray S.} and Kessels, {Wilhelmus M.M.} and Stephanie Law and Mohan Sankaran and Zide, {Joshua M.O.}",
year = "2021",
month = may,
day = "1",
doi = "10.1116/6.0001005",
language = "English (US)",
volume = "39",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}